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发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPS6447875(A)
申请公布日期
1989.02.22
申请号
JP19870200769
申请日期
1987.08.13
申请人
MITSUBISHI HEAVY IND LTD
发明人
MURATA MASAYOSHI;MORITA SHOJI;ICHINARI JOJI;TAKADA JIRO
分类号
C23C16/50;C23C16/27
主分类号
C23C16/50
代理机构
代理人
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地址
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