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经营范围
发明名称
PHOTO-CVD METHOD
摘要
申请公布号
JPS6447874(A)
申请公布日期
1989.02.22
申请号
JP19870199985
申请日期
1987.08.12
申请人
KAWASAKI STEEL CORP
发明人
OOTA TOMOHIRO;SASAKI HIROAKI;MITOMO TORU
分类号
C23C16/48
主分类号
C23C16/48
代理机构
代理人
主权项
地址
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