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发明名称
VAPOR PHASE EPITAXY METHOD FOR GROUP II-VI CRYSTAL
摘要
申请公布号
JPS6446938(A)
申请公布日期
1989.02.21
申请号
JP19870203920
申请日期
1987.08.17
申请人
NIPPON SHEET GLASS CO LTD
发明人
YODO TOKUO
分类号
H01L21/365
主分类号
H01L21/365
代理机构
代理人
主权项
地址
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