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发明名称
WAFER TRANSFER EQUIPMENT
摘要
申请公布号
JPS6447043(A)
申请公布日期
1989.02.21
申请号
JP19870204529
申请日期
1987.08.18
申请人
NEC CORP
发明人
KARITA YUTAKA
分类号
B65H1/28;B65G1/00;B65G1/07;H01L21/677;H01L21/68
主分类号
B65H1/28
代理机构
代理人
主权项
地址
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