| 发明名称 |
Polysilicon fillet |
| 摘要 |
Disclosed is an integrated circuit manufacturing technique that relies on the use of polysilicon fillets for overcoming the well known adverse effects of steep sidewalls produced by anisotropic etching processes and undercuts produced by anisotropic etching of multilayers.
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| 申请公布号 |
US4807013(A) |
申请公布日期 |
1989.02.21 |
| 申请号 |
US19870037090 |
申请日期 |
1987.04.08 |
| 申请人 |
AMERICAN TELEPHONE AND TELEGRAPH COMPANY AT&T BELL LABORATORIES |
发明人 |
MANOCHA, AJIT S. |
| 分类号 |
H01L21/033;H01L21/768;H01L23/532;H01L29/423;(IPC1-7):H01L29/78;H01L29/04;H01L23/48 |
主分类号 |
H01L21/033 |
| 代理机构 |
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代理人 |
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