发明名称 |
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摘要 |
PURPOSE:By rationalizing the dimension and position of comb-shape electrodes and confronting electrode, reflection is minimized and wire cut is eliminated at photoetching. |
申请公布号 |
JPS5910609(B2) |
申请公布日期 |
1984.03.10 |
申请号 |
JP19760045093 |
申请日期 |
1976.04.20 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
YAMAZAKI OSAMU;OCHI KENZO;SETSUNE KENTARO |
分类号 |
H03H3/08;H03H9/02;H03H9/145 |
主分类号 |
H03H3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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