发明名称 Cyclic acetals or ketals of 8-keto esters or amides
摘要 Compounds of formula I <IMAGE> (I) in conjunction with compounds that donate acid when exposed to actinic radiation, are suitable for use as positive photoresists. In formula I, R1 and R2 are hydrogen, alkyl, aryl, cycloalkyl, aralkyl or alkaryl, R3 to R8 are hydrogen or lower alkyl, X is -O- or -NR9-, where R9 is hydrogen or C1-C4alkyl n is 0 or 1, m is 2, 3 or 4 and Q is an organic radical of valency m. The photoresists are suitable for making printing formes, printed circuits, integrated circuits or silver-free photographic films.
申请公布号 US4806448(A) 申请公布日期 1989.02.21
申请号 US19870125668 申请日期 1987.11.27
申请人 CIBA-GEIGY CORPORATION 发明人 ROTH, MARTIN
分类号 C07D317/30;C07D319/06;G03C1/72;G03F7/004;G03F7/022;G03F7/039;H01L21/027;H01L21/30;(IPC1-7):G03C1/495;C07D405/14;C07D407/12;C07D407/14 主分类号 C07D317/30
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