| 摘要 |
PURPOSE:To enhance reliability and to decrease deterioration with age by providing a thin titanium nitride film having a specific thickness as a reflecting film on a resin substrate on which digital signals are formed. CONSTITUTION:The thin titanium nitride (TiN) film 8 of 500-1,000Angstrom thickness provided as the reflecting film on the resin substrate 2 on which the digital signals 3 of a bit array shape are formed is vapor-deposited by a sputtering method on the resin substrate 2. The resin substrate 2 installed on a tray 14 for conveyance of a sputtering device is sputtered by a TiN target 15 provided in a vacuum chamber 11 and the thin TiN film 8 is formed on the substrate 2 at the time when said substrate passes the vacuum chambers 10-12 in the process of production. The disk having high reliability and little deterioration with age is thereby obtd. with good mass productivity. |
