| 摘要 |
PURPOSE:To obtain a uniform superconducting thin film with good reproducibility and to make it possible to use the thin film as a superconductive material by a method wherein a composite target is used and the thin film is manufactured by a sputtering method. CONSTITUTION:A multicomponent superconducting thin film consisting of a rare earth element, an alkali earth metal and copper is manufactured by a sputtering method wherein a composite target is used. That is, the rare earth element and the alkali earth metal or these alloys or these oxides are sputtered on a Cu target substrate in a surface area ratio to correspond to the composition of the thin film, which is targeted to each of the above element, metal, alloys and oxides, and moreover, using the composite target arranged in some form of a sector, the form of a concentric circle and the form of a pinhole. Thereby, a control of the composition of the thin film can be easily performed and the thin film, whose composition and thickness are uniform and which has a superior superconductivity, can be easily obtained with good reproducibility. |
