| 摘要 |
A molecular pump is equipped with a rotor (22) that can be driven by a rotary drive, and is located so that it can turn in a pump chamber (23) formed in a stator (18). Intake (16) and outlet (24) openings formed in the stator (18) are offset from one another in the direction of the rotor axis (21). Rebounding surfaces for reflecting impacting molecules are formed at least one of the rotor (22) and stator (18) surfaces facing one another by the side surfaces (32, 34; 38', 40') of at least one helical web (28; 36; 36') winding around the rotor axis (21), so that these molecules are subjected to an overall motion leading from the intake opening to the outlet opening. <IMAGE>
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