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发明名称
MICROWAVE ION SOURCE
摘要
申请公布号
JPS6443950(A)
申请公布日期
1989.02.16
申请号
JP19870198307
申请日期
1987.08.10
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
SHIMADA MASARU;TORII YASUHIRO;WATANABE IWAO
分类号
H01J37/08;H01J27/16;H01L21/027;H01L21/265;H01L21/30
主分类号
H01J37/08
代理机构
代理人
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