发明名称 OPTICAL EQUIPMENT SUPPORTING DEVICE FOR EXCIMER LASER
摘要 PURPOSE:To perform cleaning work of both rear and front windows easily in a short time by moving an optical equipment from a position facing both the windows perpendicularly to an optical axis. CONSTITUTION:An optical equipment of a rear window side facing a rear window 2 of a light source chamber 1 and an optical equipment of a front window side facing a front window 3 are respectively so secured to moving plates 9, 14 as to bring optical axes into coincidence, and the plates are movable from a position coincident to the optical axis of a light source chamber 1 in a direction displacing from the optical axis to be supported to a supporting base. When the windows are cleaned, the plates are moved. The plates are returned to the original positions to automatically bring the equipments on the plates into coincidence with the optical axis of the chamber. Thus, both the windows can be easily cleaned for a short time, and the whole equipment can be formed compactly.
申请公布号 JPS6444080(A) 申请公布日期 1989.02.16
申请号 JP19870200049 申请日期 1987.08.12
申请人 KOMATSU LTD 发明人 KOGA NORIYUKI;AMADA YOSHIO;WAKABAYASHI OSAMU
分类号 H01S3/08;H01S3/034 主分类号 H01S3/08
代理机构 代理人
主权项
地址