发明名称 METHOD FOR SYNTHESIS OF DIAMOND
摘要 The following are disclosed: A method for synthesis of diamond which is characterized by contacting a gas obtained by excitation of carbon monoxide and hydrogen in such a ratio as carbon monoxide being at least 1 mol% per total of carbon monoxide and hydrogen with a substrate in the presence of a reducing metal. A method for synthesis of diamond which is characterized by contacting with a substrate a gas obtained by excitation of carbon dioxide and hydrogen mixed at such a ratio of carbon dioxide being 0.1-20 mol% per hydrogen. A method for synthesis of diamond by depositing diamond on the surface of a substrate by introducing onto the surface of the substrate a plasma obtained from hydrogen and carbon source gas by irradiation of microwave in a plasma generator which is characterized in that progress of microwave oscillated from one microwave oscillator is divided and thus divided respective microwaves and led to a plurality of plasma generators. A diamond synthesis apparatus which is characterized by comprising a microwave oscillator for oscillation of microwave, a branched waveguide for dividing the microwave oscillated from said microwave oscillator and a plurality of plasma generators which are connected with said branched waveguide and have a substrate for deposition of diamond, respectively.
申请公布号 EP0288065(A3) 申请公布日期 1989.02.15
申请号 EP19880106419 申请日期 1988.04.21
申请人 IDEMITSU PETROCHEMICAL CO. LTD. 发明人 ITO, TOSHIMICHI;NOSAKA, MASAAKI;HOSOYA, IKUO
分类号 C01B31/06;C23C16/27;C30B25/00;C30B25/10 主分类号 C01B31/06
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