发明名称 |
METHOD FOR SYNTHESIS OF DIAMOND |
摘要 |
The following are disclosed: A method for synthesis of diamond which is characterized by contacting a gas obtained by excitation of carbon monoxide and hydrogen in such a ratio as carbon monoxide being at least 1 mol% per total of carbon monoxide and hydrogen with a substrate in the presence of a reducing metal. A method for synthesis of diamond which is characterized by contacting with a substrate a gas obtained by excitation of carbon dioxide and hydrogen mixed at such a ratio of carbon dioxide being 0.1-20 mol% per hydrogen. A method for synthesis of diamond by depositing diamond on the surface of a substrate by introducing onto the surface of the substrate a plasma obtained from hydrogen and carbon source gas by irradiation of microwave in a plasma generator which is characterized in that progress of microwave oscillated from one microwave oscillator is divided and thus divided respective microwaves and led to a plurality of plasma generators. A diamond synthesis apparatus which is characterized by comprising a microwave oscillator for oscillation of microwave, a branched waveguide for dividing the microwave oscillated from said microwave oscillator and a plurality of plasma generators which are connected with said branched waveguide and have a substrate for deposition of diamond, respectively. |
申请公布号 |
EP0288065(A3) |
申请公布日期 |
1989.02.15 |
申请号 |
EP19880106419 |
申请日期 |
1988.04.21 |
申请人 |
IDEMITSU PETROCHEMICAL CO. LTD. |
发明人 |
ITO, TOSHIMICHI;NOSAKA, MASAAKI;HOSOYA, IKUO |
分类号 |
C01B31/06;C23C16/27;C30B25/00;C30B25/10 |
主分类号 |
C01B31/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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