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发明名称
VORRICHTUNG ZUM REINIGEN VON FLACHEN, PRAKTISCH EBENEN KLEINTEILEN, INSBESONDERE VON FLACHEN HALBLEITERSUBSTRATEN
摘要
申请公布号
ATA322587(A)
申请公布日期
1989.02.15
申请号
AT19870003225
申请日期
1987.12.09
申请人
THALLNER ERICH DIPL.ING.
发明人
分类号
H01L21/00;(IPC1-7):H01L21/304;B08B5/02
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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