| 摘要 |
<p>PURPOSE:To improve the dust free degree by floating a flexible sheet having super-conducting films above a base plate comprising a permanent magnet and an electrode and further floating a magnetic transport table above the sheet by Meissner effect and changing the distribution of electrostatic force of the base plate in a carrying apparatus in a semiconductor manufacturing process. CONSTITUTION:When the potential of an electrode 10 is kept at zero, a sheet 8 is floated above a substrate 19 by Meissner effect of a permanent magnet of the substrate 19 and super-conducting films 7a, 7b of the sheet 8, and simultaneously a transport table 9 is also floated above the sheet 8 by Meissner effect. When voltage is applied to an electrode 101 just under the transport table 9, electrostatic force is generated between the electrodes and the super-conducting film 7b, whereby the sheet 8 is curved inwards and the transport table 9 is similarly sunk. Accordingly, when the voltage is applied to the electrodes sequentially, the position curved inwards is sequentially moved to push forward the transport table 9. By this arrangement, the dust-free degree can be improved to carry an article.</p> |
