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发明名称
SUBSTRATE TRANSFER LOADER
摘要
申请公布号
JPS6443428(A)
申请公布日期
1989.02.15
申请号
JP19870195927
申请日期
1987.08.05
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TANNO TADASHI
分类号
B65G25/04;B65G47/82;B65H3/24;B65H5/16;H05K13/02
主分类号
B65G25/04
代理机构
代理人
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