发明名称 VIBRATING TYPE TWO-DIMENSIONAL DRIVING DEVICE
摘要 PURPOSE:To smooth a change of moving direction (rotation) by making oscilla tion frequency of an oscillating substance of driving sources variable and increas ing and decreasing the moving force given to a moving substance. CONSTITUTION:A vibrating type two-dimensional driving unit has a moving table 1, and three spheres 2-4 are mounted so as to swivel to attach to the plane 5, and the plane 5 can be moved to various directions. The driving sources 6-8 are mounted to each height of the equilateral triangle-like moving table 1, and the driving sources 6-8 are constituted of the oscillating substance capable of making expansion vibration in the lengthwise (arrow X direction) tilted to the plane 5, and the moving table 1 is moved to an opposite direction by pushing the plane 5 in case an expansion is made by vibration. Accordingly, increasing and decreasing control of driving energy can be made and the movements of direction of the moving table 1 can be made smoothly by making variable control of driving frequency of the driving sources.
申请公布号 JPS6443075(A) 申请公布日期 1989.02.15
申请号 JP19870197376 申请日期 1987.08.07
申请人 CANON INC 发明人 KANEKO KIYOSHI
分类号 G05D3/00;H01L41/09;H02N2/00 主分类号 G05D3/00
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