发明名称 MEASUREMENT OF ELECTROOPTIC EFFECT FOR THIN FILM
摘要 <p>PURPOSE:To achieve a measurement at a low voltage eliminating the need for handling polarization, by a method wherein semi-transparent metal films are arranged facing each other on both surfaces of a thin film sample to build a Fabry-Perot resonator and monochromatic light is made incident to determine changes in the intensity thereof. CONSTITUTION:A metal film 17b is formed on a glass substrate 17a, a thin film sample 17c is provided thereon and further, a metal film 17d is formed thereon to build a Fabry-Perot resonator with the metal films 17b and 17d parallelling each other. With an output of a pulse generator 18 to zero, a stepping motor 14 is driven to change the wavelength of a spectroscope 13 so that light transmitted through a sample body 17 at each wavelength is received with a photodiode. Then, light is varied in the wavelength applying a pulse with a known peak value by a pulse generator 18 and received with a photodiode 20. Variation of transmission during the application of voltage is determined depending on the quantity of light received and thus, a variation of refraction is obtained from a relationship previously determined between the variation of transmission and variation of refractive index.</p>
申请公布号 JPS6441838(A) 申请公布日期 1989.02.14
申请号 JP19870197289 申请日期 1987.08.08
申请人 MITSUBISHI KASEI CORP 发明人 KOBAYASHI TAKAYOSHI;UCHIKI HISAO
分类号 G01R15/24;G01N21/45;G02F1/03 主分类号 G01R15/24
代理机构 代理人
主权项
地址