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发明名称
LSI
摘要
申请公布号
JPS6441257(A)
申请公布日期
1989.02.13
申请号
JP19870196249
申请日期
1987.08.07
申请人
NEC CORP
发明人
YAMAUCHI MAKOTO
分类号
G01R31/28;G01R31/3185;H01L21/66;H01L21/822;H01L27/04
主分类号
G01R31/28
代理机构
代理人
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