MANUFACTURE OF SIC THIN-FILM,申请号JP19870197646-传众专利搜索

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发明名称	MANUFACTURE OF SIC THIN-FILM
摘要
申请公布号	JPS6441210(A)	申请公布日期	1989.02.13
申请号	JP19870197646	申请日期	1987.08.07
申请人	NEC CORP	发明人	SERA KENJI
分类号	H01L21/20;H01L21/263	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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