| 摘要 |
PURPOSE:To manufacture a discharge type excimer laser device capable of changing discharge duration by a method wherein a saturable transformer with variable inductance is used. CONSTITUTION:When a switching element 12 is opened, spiker voltage can be supplied by feeding a discharge current from a capacitor 3a only to the primary side winding 5 of a variable transformer 8 to use a core 7 in unsaturated state so that inductance may be increased. On the other hand, when the switching element 12 is closed, the spiker voltage can be supplied by feeding the discharge current from the capacitors 3a, 3b to the primary side winding 5 of the variable transformer 8 to use the core 7 in saturated state so that inductance may be decreased. Consequently, the inductance of saturable transformer 8 can be varied in binary notation so that the duration of main discharge may be arbitrarily selected for a long or short term. |
