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发明名称
DEFECTIVE INSPECTION DEVICE
摘要
申请公布号
JPS6439543(A)
申请公布日期
1989.02.09
申请号
JP19870197084
申请日期
1987.08.06
申请人
NIKON CORP
发明人
IMAMURA KAZUNORI
分类号
G01N21/88;G01N21/94;G01N21/956;G01N21/958
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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