ION BEAM NEUTRALIZATION DEVICE,申请号JP19870195681-传众专利搜索

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发明名称	ION BEAM NEUTRALIZATION DEVICE
摘要
申请公布号	JPS6438958(A)	申请公布日期	1989.02.09
申请号	JP19870195681	申请日期	1987.08.04
申请人	MITSUBISHI ELECTRIC CORP	发明人	MATSUMURA YASUSHI
分类号	H01J37/08;H01J27/02	主分类号	H01J37/08
代理机构		代理人
主权项
地址

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