| 摘要 |
Voltage measurement using the electron probe for time detection and/or qualitative and/or quantitative imaging of a point of a sample which carries a signal at at least one frequency. With the aid of a microscope in which the point is acted on by a primary beam (PE), a secondary signal (SE) is derived from the point and is evaluated via a detector (DT) and a measurement processing arrangement (MV, MV'). The time response of the secondary signal can be recovered by reverse Fourier transformation of those features of the secondary signal obtained from the measurement processing arrangement, in the frequency domain, in a computer (R). <IMAGE>
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