| 摘要 |
PURPOSE:To improve adaptability to a change of a pattern in a clean room, by a method wherein the proper number of return ports with a fan, filters, and blind patches are mounted to the under surface of a ceiling chamber so that they can freely change positions and are replaceable with each other. CONSTITUTION:A ceiling chamber unit 21 having a latticeform ceiling frame 22 is situated to an under surface, and a proper number of return ports 23 with fans, HEPA filters 24, and blind patches 25 and arbitrarily arranged and mounted on the ceiling frame 22 so that they can freely change positions and are replaceable with each other. A given number of the ceiling chamber units 21 are arranged and placed on a clean room. |
