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发明名称
METHOD OF GROWTH OF THIN FILM LAYER FOR USE IN A COMPOSITE SEMICONDUCTOR
摘要
申请公布号
EP0215436(A3)
申请公布日期
1989.02.08
申请号
EP19860112487
申请日期
1986.09.09
申请人
SUMITOMO ELECTRIC INDUSTRIES LIMITED
发明人
MATSUI, YUICHI OSAKA WORKS OF SUMITOMO LTD.
分类号
C23C14/00;C23C14/34;C30B23/02;H01L21/20;H01L21/203;(IPC1-7):H01L21/203;C30B29/40
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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