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发明名称
ION SOURCE
摘要
申请公布号
JPS6438700(A)
申请公布日期
1989.02.08
申请号
JP19870194164
申请日期
1987.08.03
申请人
MITSUBISHI ELECTRIC CORP
发明人
MORIMOTO HIROAKI;HOSONO KUNIHIRO;TSUKAMOTO KATSUHIRO;SASAKI YOSHINOBU
分类号
G21G4/04;G21K5/04;H01L21/265
主分类号
G21G4/04
代理机构
代理人
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