| 发明名称 |
Aluminum plug using insulating sidewall space. |
| 摘要 |
<p>A method of forming aluminum contacts 7 using insulating sidewall spacers 5 at the edges of windows in a dielectric layer 3 is described. The contacts are fabricated by forming insulating sidewall spacers in the windows, depositing a metal layer and etching to form a planar surface which may expose the underlying dielectric layer.</p> |
| 申请公布号 |
EP0302647(A1) |
申请公布日期 |
1989.02.08 |
| 申请号 |
EP19880306847 |
申请日期 |
1988.07.26 |
| 申请人 |
AMERICAN TELEPHONE AND TELEGRAPH COMPANY |
发明人 |
LEE, KUO-HUA;LU, CHIH-YUAN |
| 分类号 |
H01L21/3205;H01L21/768;(IPC1-7):H01L21/60 |
主分类号 |
H01L21/3205 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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