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发明名称
SPUTTERING OF A PERMALLOY LAYER
摘要
申请公布号
EP0144851(B1)
申请公布日期
1989.02.08
申请号
EP19840113992
申请日期
1984.11.19
申请人
SIEMENS AKTIENGESELLSCHAFT BERLIN UND MUNCHEN
发明人
POTZLBERGER, HANS-WERNER, DIPL.-ING.;BOCK, SIEGFRIED
分类号
G11B5/31;C23C14/14;C23C14/34;H01F41/18;(IPC1-7):H01F41/18
主分类号
G11B5/31
代理机构
代理人
主权项
地址
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