| 摘要 |
A process for forming deposited film, which comprises: (a) the step of preparing a substrate having crystal nuclei or regions where crystal nuclei are selectively formed scatteringly on the surface for forming deposited film in a film forming space for formation of deposited film; (b) the step of forming deposited film on the above substrate by introducing an activated species (A) formed by decomposition of a compound (SX) containing silicon and a halogen and an activated species (B) formed from a chemical substance for film formation (B) which is chemically mutually reactive on said activated species (A) separately from each other into said film-forming space to effect chemical reaction therebetween; (c) the step of introducing a gaseous substance (E) having etching action on the deposited film to be formed or a gaseous substance (E2) forming said gaseous substance (E) into said film-forming space during said film-forming step (b) and exposing the deposited film growth surface to said gaseous substance (E) to apply etching action threon, thereby effecting preferentially crystal growth in a specific face direction; (d) irradiating said gaseous substance (E) with light energy during said step (c), and (e) the step of increasing etching activity of said gaseous substance (E) by irradiation of light energy. |
