发明名称 WIRE BONDING DEVICE
摘要 PURPOSE:To make the rapid locating with high precision easier realizing the unmanned bonding process by a method wherein a lead and a solid element may be connected by means of a bonding wire while attracting and holding a stem. CONSTITUTION:A manifold 21 supplying a vacuum cylinder 18 with vacuum pressure 201 to adsorb and fix a stem 1 is provided between the vacuum cylinder 18 and a rotating shaft 19. The stem 1, being carried up to a bonding device 16 by means of a sleeving unit 29 and a cam 29, is constantly lifted upward by a raising spring containing the vacuum cylinder 18 or a servomotor 20 with its position finally located by the surface of the cam 29. The cam 29 comprising a bonding head, a stem rotating unit, thus forming a sequence may be driven by a driving shaft 34.
申请公布号 JPS5950535(A) 申请公布日期 1984.03.23
申请号 JP19820159583 申请日期 1982.09.16
申请人 TOKYO SHIBAURA DENKI KK 发明人 TAMAI KOUICHI
分类号 H01L21/60 主分类号 H01L21/60
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