| 摘要 |
PURPOSE:To control the wet processors without fail by a method wherein the first wet processor using the first wet processing solution provided with a shutter part to prevent the wet processing solutions from mixing with each other is connected to the second wet processor using the second wet processing solution. CONSTITUTION:The first wet processor 15B using the first wet processing solution with an opening and closing shutter part 44A provided between itself 15B and the second wet processor 15C to prevent the wet processing solutions from mixing with each other is connected to the second wet processor 15C using the second wet processing solution. Thus, after the completion of the wet processing at the first wet processor 15B, the second wet processor 15C can immediately start the wet processing so that the wet processing may be controlled without rail avoiding the mixture of respective wet processing solutions in the first wet processor 15B and the second wet processor 15C due to the shutter part 44A provided between the two wet processors. |
