发明名称 Device for the preparation of a gas mixture
摘要 A device for the preparation of a gas mixture includes a closed circuit. Mixture components of a gas mixture are fed with greatly differing partial pressures ranging from low to highest partial pressures to the closed circuit. The gas mixture is circulated in the closed circuit. At least one of the mixture components with low partial pressure is replenished at increasingly shorter intervals. The gas mixture is completely exchanged when a given minimal length of the intervals is reached. At least one branch parallel to a section of the closed circuit conducts the gas mixture substantially completely free of flow losses. The at least one branch includes a magnetic valve, a differential pressure sensor in series with the magnetic valve having a total measuring range corresponding to the low partial pressures, the differential pressure sensor controlling the replenishment of the mixture components having the low partial pressure exclusively while the magnetic valve is closed, and an absolute pressure sensor controlling at least the replenishment of the mixture component having the highest partial pressure.
申请公布号 US4803693(A) 申请公布日期 1989.02.07
申请号 US19870103408 申请日期 1987.09.30
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 SCHRAMM, HERBERT
分类号 H01S3/036;H01S3/041;(IPC1-7):H01S3/22 主分类号 H01S3/036
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