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发明名称
MANUFACTURE OF INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS6436028(A)
申请公布日期
1989.02.07
申请号
JP19870192829
申请日期
1987.07.31
申请人
NEC CORP
发明人
GOTO FUMIHIKO
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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