发明名称 Manipulator for standard mechanical interface apparatus
摘要 PCT No. PCT/US86/01758 Sec. 371 Date Apr. 20, 1987 Sec. 102(e) Date Apr. 20, 1987 PCT Filed Aug. 25, 1986 PCT Pub. No. WO87/01361 PCT Pub. Date Mar. 12, 1987.The present invention provides an apparatus for transferring a cassette holding articles to be processed to and from a container supported at a processing station where the processing station has a cassette port for receiving the cassette when the cassette moves along a central axis extending from outside the processing station through the cassette port, and into the processing station, said apparatus comprising: a platform device including a cassette platform transportable substantially along the central axis for transferring the cassette to and from the container substantially along the central axis; a manipulator device including a first member extending substantially orthogonal to the central axis, the first member including a first portion and a second portion; a pivoting arm including a pivoting portion and a coupling portion, the pivoting portion mounted pivotally adjacent to the second portion of the first member, the pivoting arm operable to pivot about a pivot axis extending substantially through the pivoting portion and substantially perpendicular to the central axis; a coupling device mounted on the coupling portion of the pivoting arm for coupling to the cassette; and a tilt device for tilting the coupling device and the cassette coupled thereto during pivoting by said pivoting arm, such that during the pivoting the cassette tilts relative to the central axis.
申请公布号 US4802809(A) 申请公布日期 1989.02.07
申请号 US19870049393 申请日期 1987.04.20
申请人 ASYST TECHNOLOGIES 发明人 BONORA, ANTHONY C.;O'SULLIVAN, ANDREW W.
分类号 H01L21/677;(IPC1-7):B65G65/00 主分类号 H01L21/677
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