| 摘要 |
A scanning electron microscope for scanning the surface of a specimen with an electron beam to detect secondary electrons, backscattered electrons, or X-rays emitted from the specimen, thereby forming an image of the surface of the specimen, is provided with a specimen table capable of making a horizontal movement, a vertical movement a rotating operation and a tilting operation, an arithmetic unit for converting the output of a detector for detecting the secondary electrons, backscattered electrons or X-ray into a digital signal to store the digital signal, and for calculating the amount of each of the horizontal movement, vertical movement, rotating operation and tilting operation of the specimen table, on the basis of the stored information, an indication given from the outside, and others, and a controller for controlling the specimen table on the basis of a calculated value from the arithmetic unit.
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