发明名称 Magnetic/electric field measuring device by means of an electron beam
摘要 A magnetic/electric field measuring device is disclosed, which is provided with an electron beam generator for generating an electron beam finely focused; a sample table, on which a sample is placed; electron beam deflectors for sweeping the electron beam two-dimensionally along an end surface of the sample; two-dimensional semiconductor position detection element using a photodiode for detecting the incident position of the electron beam, which has passed along the end surface of the sample; and a display section for displaying the position signal coming from said two-dimensional semiconductor position detection element in synchronism with a scan signal for the electron beam.
申请公布号 US4803430(A) 申请公布日期 1989.02.07
申请号 US19880154183 申请日期 1988.02.08
申请人 HITACHI, LTD. 发明人 SHINADA, HIROYUKI;TODOKORO, HIDEO;FUKUHARA, SATORU
分类号 H01J37/20;G01R29/14;G01R33/02;H01J37/22;H01J37/26;(IPC1-7):G01R33/02 主分类号 H01J37/20
代理机构 代理人
主权项
地址