发明名称 |
Magnetic/electric field measuring device by means of an electron beam |
摘要 |
A magnetic/electric field measuring device is disclosed, which is provided with an electron beam generator for generating an electron beam finely focused; a sample table, on which a sample is placed; electron beam deflectors for sweeping the electron beam two-dimensionally along an end surface of the sample; two-dimensional semiconductor position detection element using a photodiode for detecting the incident position of the electron beam, which has passed along the end surface of the sample; and a display section for displaying the position signal coming from said two-dimensional semiconductor position detection element in synchronism with a scan signal for the electron beam.
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申请公布号 |
US4803430(A) |
申请公布日期 |
1989.02.07 |
申请号 |
US19880154183 |
申请日期 |
1988.02.08 |
申请人 |
HITACHI, LTD. |
发明人 |
SHINADA, HIROYUKI;TODOKORO, HIDEO;FUKUHARA, SATORU |
分类号 |
H01J37/20;G01R29/14;G01R33/02;H01J37/22;H01J37/26;(IPC1-7):G01R33/02 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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