Method and apparatus for detecting dielectric defects

摘要

Small and/or large defects in dielectric materials can be detected by bombarding one surface of the dielectric material with gas ions in order to impart a charge on that surface while the opposite surface is under the influence of an opposite charge. The dielectric material is then exposed to an indicator substance having an affinity for the charge of the gas ions and a tendency to congregate on regions of the dielectric materials which contain defects.