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发明名称
PHOTO-ETCHING
摘要
申请公布号
JPS6436026(A)
申请公布日期
1989.02.07
申请号
JP19870192325
申请日期
1987.07.31
申请人
SONY CORP
发明人
SHINOHARA KEIJI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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