| 发明名称 |
Source of charged particles beam |
| 摘要 |
A source of charged particles beam which can be used either as an electron source or an ion source and has a tip formed of carbide, nitride or di-boride of at least one of elements Ti, Zr, Hf, V, Nb and Ta or formed of hexa-boride of at least one of rare earth metal elements of atomic number 57 to 70.
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| 申请公布号 |
US4438371(A) |
申请公布日期 |
1984.03.20 |
| 申请号 |
US19820377417 |
申请日期 |
1982.05.12 |
| 申请人 |
HITACHI, LTD. |
发明人 |
HOSOKI, SHIGEYUKI;FUTAMOTO, MASAAKI;KAWABE, USHIO;ISHITANI, TOHRU;TAMURA, HIFUMI |
| 分类号 |
H01J27/26;H01J37/073;H01J37/08;(IPC1-7):H01J7/24 |
主分类号 |
H01J27/26 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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