| 摘要 |
PURPOSE:To obtain an oxygen-added amorphous silicon (a-Si) electrophotographic receptor which has good film characteristics and sufficient photosensitivity by forming an a-Si film on a drum-type substrate made of glass or ceramic coated with a metallic film. CONSTITUTION:A ''Pyrex'' drum substrate 1 coated with an Al film 2 is held at about 250 deg.C and mixed gas of SiH4 and O2 is plasma-decomposed by a glow discharging method to form the a-Si (a-Si:H:O) film 3 thereupon. Thus, the a-Si film is formed on the most suitable condition by using the glass drum which is held at sufficiently high temperature, so that the a-Si electrophotographic receptor which has good film characteristics and sufficient photosensitivity is manufactured at high yield. |
