发明名称 SEMICONDUCTOR STORAGE DEVICE
摘要 PURPOSE:To reduce the area of a cell without separately forming a region for shaping a high resistor by forming both an anode and a cathode for a schottky barrier diode SBD onto an SBD diffusion layer, on the cathode side of which an N-type impurity is diffused, and shaping the high resistor into said diffusion layer. CONSTITUTION:A schottky barrier diode SBD is formed by bringing an anode electrode 1 and a low-concentration diffusion layer 3 into contact. The anode electrode 1, a cathode electrode 2 and high-concentration diffusion layers 4 are brought into ohmic-contact, and a high resistor VHR is shaped between the electrode 1 and the electrode 2 by the low-concentration diffusion layer 3. Consequently, the SBD and the VHR are formed in parallel connection between the electrode 1 and the electrode 2. Accordingly, a region for shaping the high resistor VHR need not be shaped separately, thus reducing the area of a memory cell.
申请公布号 JPS6432671(A) 申请公布日期 1989.02.02
申请号 JP19870187522 申请日期 1987.07.29
申请人 HITACHI LTD 发明人 SHIBA TAKEO;ONOUCHI YUKIHIRO;YAMAGUCHI KUNIHIKO;TAMAOKI YOICHI;IKEDA SEIJI;WATANABE KUNIHIKO;KOIZUMI TORU
分类号 G11C11/411;G11C11/40;H01L21/331;H01L21/822;H01L21/8222;H01L21/8229;H01L27/04;H01L27/06;H01L27/10;H01L27/102;H01L29/47;H01L29/72;H01L29/73;H01L29/732;H01L29/872 主分类号 G11C11/411
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