| 摘要 |
PURPOSE:To synthesize a diamond of high film-formation rate, sufficient film- thickness and superior film-property by quenching through colliding a cold substrate with the thermo-plasma jet of a gas containing hydrogen and carbon compd. CONSTITUTION:By applying a DC current between an anode 1 and a cathode 2 under the flow of a gas containing a hydrogen 3 and a carbon compd. gas 4, and a discharging arc furnace 5, the said gas is rapidly heated to form a thermoplasma of >=10,000 deg.C at around a nozzle 6. Owing to the vol. expansion due to a rapid temp. increase, the said plasma spouts, as an supersonic plasma jet, from a nozzle 6 into a chamber 7 under reduced pressure. The plasma jet is collided efficiently on to the cooled substrate 10, and quenched to react on to the substrate prior to the disappearance of a short-life hydrogen atom and others, and a diamond film 11 is synthesized thereby. Owing to a powerful ultraviolet ray radiated by the arc discharge, the kinetic energy due to a photoactivation and a collision of supersonic particles is further participated in the reaction on to the substrate. |
