METAL VAPOUR DEPOSITION

摘要

A method and an apparatus 10 are provided for the production of a layer 60 of a metallic material by deposition from the vapour phase onto an exposed surface 43 of a collector. The collector is a rotary drum 30 comprising a hollow cylindrical outer member 42, a coaxial hub 44, and a plurality of spokes 46 pivotally connected to the outer member 42 and to the hub 44, all the spokes 46 being aligned at the same oblique angle to the radius at the respective connections to the hub 44. Thermal expansion of the outer member 42 relative to the spokes 46 is accommodated by rotation of the outer member 42 relative to the hub 44 and a consequent change in the oblique angle, so minimizing thermally induced stresses in the spokes 46. The exposed surface 43 may be maintained at a desired temperature by passing a heat transfer liquid through ducts 94 within the rotary drum 30 and controlling the temperatures of the liquid in accordance with the thickness of the deposited layer 60.