发明名称 COPPER METALLIZATION FOR DIELECTRIC MATERIALS
摘要 A method of providing a copper metallization on a dielectric or semiconductive body, and a dielectric or semiconductive body having a metallization consisting essentially of copper. According to the method, a mixture of copper oxide powder and 0 to 15 weight percent reduction-resistant glass frit is dispersed in an organic vehicle and a solvent to produce a paste. The paste is applied to the body to provide a coating thereon. The coating is dried to remove the solvent, and then the coated body is fired in an oxidizing atmosphere at a temperature below the melting temperature of the glass frit to remove the organic vehicle. Finally, the coated body is fired a second time in an atmosphere which is reducing to the copper oxide but substantially nonreducing to the glass frit. The second firing is at a temperature from 700 DEG to 1050 DEG C. for from 120 to 15 minutes to convert the copper oxide to copper metal. The metallized body may comprise a reduction-resistant dielectric body and a metallization consisting essentially of copper, with no glass frit.
申请公布号 DE3475799(D1) 申请公布日期 1989.02.02
申请号 DE19843475799 申请日期 1984.05.10
申请人 CENTRALAB INC. 发明人 AKSE, JAMES ROLAND;LONG, STANLEY ARNOLD
分类号 C23C20/04;C04B41/51;H01B1/16;H01G4/232;H05K1/09;(IPC1-7):C23C18/38;H01G4/08;H01L21/441 主分类号 C23C20/04
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