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发明名称
MANUFACTURE OF SILICA GLASS
摘要
申请公布号
JPS6432638(A)
申请公布日期
1989.02.02
申请号
JP19870187536
申请日期
1987.07.29
申请人
HITACHI LTD
发明人
ITO CHIKAICHI
分类号
H01L21/316;C03B8/02;H01L21/312
主分类号
H01L21/316
代理机构
代理人
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地址
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