REDUCED-PRESSURE CVD DEVICE,申请号JP19870187200-传众专利搜索

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发明名称	REDUCED-PRESSURE CVD DEVICE
摘要
申请公布号	JPS6431975(A)	申请公布日期	1989.02.02
申请号	JP19870187200	申请日期	1987.07.27
申请人	MATSUSHITA ELECTRON CORP	发明人	NAKAGAWA SHOICHI;TSUJII HIDEKAZU
分类号	H01L21/205;C23C16/46;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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