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发明名称
THIN FILM-FORMING EQUIPMENT
摘要
申请公布号
JPS6431969(A)
申请公布日期
1989.02.02
申请号
JP19870187343
申请日期
1987.07.27
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
MATSUOKA SHIGETO;ONO KENICHI
分类号
C23C14/36;C23C14/35;H01L21/203
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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