| 摘要 |
A collecting spindle assembly is provided for lifting and rotating a substrate mounting chassis (1) within a high vacuum sputtering chamber. The assembly comprises a first shaft (5) within which is mounted a second shaft (2) the axis of which is parallel to, but offset from, that of the first shaft. One end of the second shaft (2) is provided with an eccentrically-mounted bearing (3) in spaced relation to a protrusion (4) provided on the corresponding end of the first shaft. By relatively rotating the shafts (5, 2) the spacing between the bearing (3) and protrusion (4) can be altered whereby, to effect a clamping/unclamping action. The shafts (5, 2) extend out through the chamber wall where rotational drive means (10, 13, 27, 29) are provided for relatively rotating the shafts. These drive means comprise an actuator (10, 13) arranged to effect translational movement of a high helix screw (27) that is constrained against rotation, and a helix nut (29) engaged by the screw and coupled to second shaft (2). |
