发明名称 Method and apparatus for coating a substrate with a thin metal layer
摘要 In this method, a thin metal foil (5), e.g. a gold foil, is positioned directly in front of a substrate (6), e.g. a copper support, to be coated. By means of a pulsed laser beam (4) focused via a lens system (3), metal is transferred from this metal foil (5) locally onto the substrate (6). In this way, microregions of components, connectors or printed circuit boards can be provided with local gold contacts. By using special optical image and diaphragm systems (8), it is also possible in the focusing range, to effect instead of a surface coating a structuring of the substrate (6) with metal in order to build up internal structures of microchips. An Nd-YAG laser (1) operating in the UV range is preferably used. <IMAGE>
申请公布号 DE3724109(A1) 申请公布日期 1989.02.02
申请号 DE19873724109 申请日期 1987.07.21
申请人 ASEA BROWN BOVERI AG 发明人 ESROM,HILMAR,DIPL.-PHYS.DR.;WOLF,UDO,DIPL.-PHYS.
分类号 B23K26/20;C23C24/08;H05K3/04;H05K3/40 主分类号 B23K26/20
代理机构 代理人
主权项
地址